
                   D e f a u l t                                                                                                                   I S A _ V a c u u m F i l t e r                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                         ;tjf*OI_Hޛ~*5ᒒJe!l                  I S A _ V a c u u m F i l t e r                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                             $ S y m b o l                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                       $ S y m b o l                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                "   L i n e a _ P r o d u c c i o n                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                       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 a   u s e r - c o n f i g u r e d   S y m b o l   u s e d   t o   s h o w   p r o c e s s   g r a p h i c s   h  UQ K_ j  UQ K_      D e f a u l t   k  UQ K_ r  UQ K_
      E n a b l e      p s  UQ K_ u  UQ K_        v  UQ K_ w  UQ K_        x  UQ K_        y  UQ K_        z  UQ K_        {  UQ K_        |  UQ K_
(      E n g i n e P l a t f o r m      f ~  UQ K_   UQ K_J                "   I S A _ V a c u u m F i l t e r                       UQ K_
   
   N o n e      l   UQ K_      UQ K_          UQ K_          UQ K_          UQ K_          UQ K_                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                       d                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                     I S A _ V a c u u m F i l t e r                                                               UQ K_ UQ K_ UQ K_ UQ K_ 	    d UQ K_         d UQ K_      S y m b o l   d d UQ K_	       e d UQ K_        f d UQ K_         
       g d UQ K_ h d UQ K_ i d UQ K_	       j d UQ K_                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                       e d                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                      
   
          I S A _ V a c u u m F i l t e r                                                               UQ K_ UQ K_ UQ K_ UQ K_ 
    e UQ K_         e UQ K_       V i s u a l E l e m e n t   d e UQ K_       V a c u u m   f i l t e r   e e UQ K_      S y m b o l   f e UQ K_U
  M
  PNG

   
IHDR   ]   d   <   sRGB    gAMA  a   	pHYs    od  	IDATx^[LIMLL']38: (PD902	8 ÈE; ]~&a8pΩM'~]]aPeQ}i([+L:			eKA*tRs
T͘<y2sirK.Űa0rH\xQڪ\)zmm-ÇVJ_xI&]ڢl)Ǐꊦ&i%{'ݻwR2
c<y---())Ajj*cemf˯n=gوis9y]Wa梢B{'o߾Hc#CKIGo%(j@}
ѭ7zpqG[|k9$=u̜9</_J{jtWW/ .+\coc4ʮ :..W!vGxE=}T:2~2tMcNNRN
e2銠hp!88kiϟv|˞ݼc9Xj
&VKʤЩC\b2Z:+jbbbXF&~-$&&a6 %뙅='N䈃k֐ϟ?vqm]S?	S)<2q1T?Ft
UB`:9X*tVs
UB`:9X*tVs
UB`:9X*tVs)WWWzkL}ƌYcƌ#z_իWsVjMG'''\|Y?BcS6/8z8Rz#`:9)쳑|{cs J뷱qff9/B88zh\*-(?@Bx̃bfY
>hG	.*\''CKf[ #޾}+Q_E݄#ǲ}37j7c24]g4(=;VjfںavPK0Y&[̝qӎ3f<EyM33480(xD#$,7;g
;>fiTc<GF0\	iABx'y,IMΨ*T)v?Y6߉k	s^v͛7 ^Y]ę2lLa-ܘ0-+Tt}f(n$''KDA'={vAJq,YRnZ;2X]]~nfiMv؀hᨨ(ܳ_ㇵ?)S3+ fqF)e^mƨfSg
L:cjSk5oe3EݻwRNNaKVT71Z+ЌڙP^뿅mJ:P4h$˖D~a1 v;qe"VМPgj++ݐ#cv"DQ=Lc5$轊)֎k7[a.N7aC&tW;ǳ	T2$)nFxd,@\&4O! (\쒳[bl4pP\&2	^<)Bmnjgΐ]A)
H	u/.Eh):]===Y@CLq9MR!gkstk<|0%M 'pjIz:::᧍8]xYXC>wsI^^Z0
	DY(@icr/k=)*ߧXpڍP^-GC٠hyګcϻ+[ |
	"gIbwA'<eV$j

x2?R܁	
qZ+^<4^C!4W555{,(LMPX$tIclI# A'Q0w,8蕔|CNz1Z:CmcN>YztBsnCE]]7ytlR֔v	A!&7AU]]=\׬5i>rkd%I	7꽓ߛ:<;&K!at=]ggjbPXX(%K6I,ۯWg몆k3LzP(W/YAUff&B#"tYݕKXwܑ~K9%t]Ս팜S݁K%B''y~4E4jf}in:G 53ڀ-˗]X:歭'mQ],9HA*tRsPVV&L J"k4q5QFU>KwL8QT>:eJ[-E@n):ɒo՚["tՖ'bRab    IENDB`g e UQ K_ h e UQ K_
    i e UQ K_
    j e UQ K_    2                                                    Arial  @A      #            	        HC  zC  B  HBGC  yCC  yCCCGCC  HC  zC  B  HB   Polygon2                       2                            Y@      Y@                               ?  ?        *>       ??UUU?      ?       ?  ?        C  *C      A7C  *C7C  *C7C <C7C <C  C  *C      A   Line1                                                              ?   ?            C  C      A7C C7C C7C @C7C @C  C  C      A   Line2                                                              ?   ?            C  pC  B    ]tC  pC  C  pC  C  pC]tC  pC  C  pC  B       Line3                                                          ?       ?      "     \C <C  B  B`C <C~ÕC <C~ÕC  C`C  C  \C <C  B  B   Path1                       2                            Y@      Y@                                 \C <C  B  Bmާ?          ?ۼ       
       [CGC BB[CGC  CGC  CC[CC [CGC  tBB [CGC @CGC @CC [CC  	PolyLine2                                                                   ?   ?  ?  ?   ?  ?       !   ާ\C <C`B  8Aާ\C <CC <CC  HCާ\C  HC  \C <C  pB  8A   Arc1                                                 HFBL  ??      ?   ?y@Z?@.IC%}<CDBwdB                                                                                                        C sC             <=HHyИ28@	     	  Arial            k e UQ K_     